JPS5939708A - 炭化けい素微粉末の製造方法 - Google Patents

炭化けい素微粉末の製造方法

Info

Publication number
JPS5939708A
JPS5939708A JP57147342A JP14734282A JPS5939708A JP S5939708 A JPS5939708 A JP S5939708A JP 57147342 A JP57147342 A JP 57147342A JP 14734282 A JP14734282 A JP 14734282A JP S5939708 A JPS5939708 A JP S5939708A
Authority
JP
Japan
Prior art keywords
silicon carbide
organosilicon compound
carbide powder
temperature
fine silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57147342A
Other languages
English (en)
Japanese (ja)
Other versions
JPS615646B2 (en]
Inventor
Morinobu Endo
守信 遠藤
Minoru Takamizawa
高見沢　稔
Tatsuhiko Motomiya
本宮　達彦
Yasushi Kobayashi
小林　泰史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP57147342A priority Critical patent/JPS5939708A/ja
Publication of JPS5939708A publication Critical patent/JPS5939708A/ja
Priority to US06/706,238 priority patent/US4676966A/en
Publication of JPS615646B2 publication Critical patent/JPS615646B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C01B32/977—Preparation from organic compounds containing silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/80—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70
    • C01P2002/82—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70 by IR- or Raman-data
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/60—Optical properties, e.g. expressed in CIELAB-values

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Carbon And Carbon Compounds (AREA)
JP57147342A 1982-08-25 1982-08-25 炭化けい素微粉末の製造方法 Granted JPS5939708A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57147342A JPS5939708A (ja) 1982-08-25 1982-08-25 炭化けい素微粉末の製造方法
US06/706,238 US4676966A (en) 1982-08-25 1985-02-27 Method for the preparation of a fine powder of silicon carbide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57147342A JPS5939708A (ja) 1982-08-25 1982-08-25 炭化けい素微粉末の製造方法

Publications (2)

Publication Number Publication Date
JPS5939708A true JPS5939708A (ja) 1984-03-05
JPS615646B2 JPS615646B2 (en]) 1986-02-20

Family

ID=15428010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57147342A Granted JPS5939708A (ja) 1982-08-25 1982-08-25 炭化けい素微粉末の製造方法

Country Status (2)

Country Link
US (1) US4676966A (en])
JP (1) JPS5939708A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225032A (en) * 1991-08-09 1993-07-06 Allied-Signal Inc. Method of producing stoichiometric, epitaxial, monocrystalline films of silicon carbide at temperatures below 900 degrees centigrade

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2609461B1 (fr) * 1987-01-08 1990-12-21 Cerex Procede de fabrication de poudres ceramiques et poudres obtenues
US4891339A (en) * 1987-10-23 1990-01-02 Aerochem Research Laboratories, Inc. Process and apparatus for the flame preparation of ceramic powders
JPH01166534U (en]) * 1988-05-13 1989-11-22
US5436207A (en) * 1993-12-10 1995-07-25 Dow Corning Corporation Process for preparing silicon carbide powder from vaporized polysiloxanes
KR100682886B1 (ko) * 2003-12-18 2007-02-15 삼성전자주식회사 나노입자의 제조방법
US7939044B2 (en) * 2008-02-11 2011-05-10 Alexander Mukasyan Method of manufacturing sub-micron silicon-carbide powder
KR101413653B1 (ko) 2012-03-14 2014-07-01 엘지이노텍 주식회사 고순도 탄화규소 분말의 제조방법
CN113149013B (zh) * 2021-04-30 2023-05-23 天津理工大学 一种制备碳化硅微米棒的方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA592456A (en) * 1960-02-09 Enk Eduard Process for the production of crystalline silicon carbide
DE1047180B (de) * 1958-04-03 1958-12-24 Wacker Chemie Gmbh Verfahren zur Herstellung von sehr reinem kristallinem Siliciumcarbid
US4117057A (en) * 1975-06-25 1978-09-26 The Research Institute For Iron, Steel And Other Metals Of The Tohoku University Silicon carbide sintered moldings and a method for producing the same
DE2744636A1 (de) * 1977-10-04 1979-05-17 Wolfgang Dipl Ing Boecker Verfahren und vorrichtung zur herstellung von hochreinem siliciumcarbidpulver und seine verwendung
US4298559A (en) * 1980-07-23 1981-11-03 Dow Corning Corporation High yield silicon carbide from alkylated or arylated pre-ceramic polymers
US4310482A (en) * 1980-07-23 1982-01-12 Dow Corning Corporation High yield silicon carbide pre-polymers
US4414403A (en) * 1980-11-21 1983-11-08 Union Carbide Corporation Branched polycarbosilanes and their use in the production of silicon carbide
US4404153A (en) * 1981-01-15 1983-09-13 Dow Corning Corporation Process for the preparation of poly(disilyl)silazane polymers and the polymers therefrom
US4571331A (en) * 1983-12-12 1986-02-18 Shin-Etsu Chemical Co., Ltd. Ultrafine powder of silicon carbide, a method for the preparation thereof and a sintered body therefrom

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225032A (en) * 1991-08-09 1993-07-06 Allied-Signal Inc. Method of producing stoichiometric, epitaxial, monocrystalline films of silicon carbide at temperatures below 900 degrees centigrade

Also Published As

Publication number Publication date
JPS615646B2 (en]) 1986-02-20
US4676966A (en) 1987-06-30

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